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氧化钒薄膜制备工艺现状及发展 被引量:1

Status and development of manufacture process of vanadium oxide thin film
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摘要 我国钒产业发展迅速,开发钒新材料是钒产业可持续发展的重要途径。氧化钒薄膜具有从半导体到金属态的可逆性相变性能,其作为热敏材料具有广阔的应用前景。本文分析了常见氧化钒薄膜制备工艺的特点及应用情况,指出存在的问题,对我国氧化钒薄膜制备工艺的发展提出了建议。 China vanadium industry is developing rapidly, the development of new materials of vanadium is an im- portant aspect of the sustainable development of vanadium industry. The vanadium oxide thin film has the property of reversible phase change from the semiconductor to metal, which has broad application prospects as the heat sen- sitive materials. Characteristics and applications of manufacture of some common vanadium oxide thin films were analyzed, existing problems were pointed out, meanwhile some suggestions of development of manufacture process of vanadium oxide thin film were made.
出处 《中国有色冶金》 北大核心 2015年第3期75-78,共4页 China Nonferrous Metallurgy
基金 陕西省2011科技统筹重大地方专项(2011KPDZ01-04)
关键词 薄膜 钒氧化物 可逆相变 材料 thin film vanadium oxide reversible phase change material
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