固体润滑轴承用9Cr18不锈钢离子注入与磁控溅射改性真空摩擦学研究

Vacuum Tribological Property of Solid Lubrication Bearing of Surface-Modified 9Cr18 Steel

为了提高空间固体润滑滚动轴承耐磨寿命,采用全方位离子注入和磁控溅射技术对空间固体润滑轴承用9Cr18材料进行耐磨减摩表面改性研究。首先对9Cr18不锈钢试样表面注入N+、Ti+、Ti++N+,对离子注入后试样采用磁控溅射技术沉积MoS2-Ti薄膜。通过测试注入前后试样粗糙度及硬度,评价不同注入离子及无离子注入不同基底材料下溅射MoS2-Ti薄膜的附着力、真空摩擦学、薄膜磨损率等性能。结果表明离子注入通过提高9Cr18不锈钢基底硬度,能够提高复合改性后9Cr18不锈钢材料真空摩擦学性能20%。

The entire surface of the solid lubrication bearing made of 9Cr18 stainless steel was modified by a combination of plasma immersion ion implantation（PIII）of N＋and Ti＋ions and magnetron puttering of MoS2,to improve its service life when installed in space craft.The influence of the surface modification conditions,including but not limited to the dosages of N＋and Ti＋ions,implantation voltage and RF power,on the surface roughness and mechanical properties of the modified surfaces in vacuum was experimentally investigated.The results show that the surface modification has a major impact on the mechanical properties,but weakly affects the surface roughness.To be specific,the surface modification strongly increased the micro-hardness,interfacial adhesion and wear-resistance,but decreased the friction coefficient and wear rate.The tribological performance in vacuum of the surface modified bearing was found to be 20%better than that of 9Cr18 stainless steel.