7A04铝合金表面DLC薄膜制备及性能研究

Synthesis of Diamond-Like Carbon Coatings on 7A04 Al-Alloy Surfaces Modified with Si-Layer

为提高7A04铝合金的表面性能,利用射频辅助等离子体浸没离子注入与沉积设备,在其表面制备类金刚石(DLC)薄膜。由于DLC薄膜与铝合金基体力学性能差别较大,导致膜基结合力差。本研究采用非平衡磁控溅射技术预先沉积一层Si膜,作为过渡层改善膜基结合力;利用激光拉曼光谱仪、维式显微硬度计、纳米划痕仪、摩擦磨损试验机等设备,系统分析了薄膜结构、显微硬度、膜基结合力及耐磨损性能。结果表明,Si过渡层的制备提高了基体的承载能力和膜基结合力,进而使耐磨损性能得到大幅度提高。

The diamond-like carbon（DLC）coating was synthesized by RF-assisted plasma immersion ion implantation and deposition on the 7A04Al-alloy surfaces,modified with Si-transition layer grown by unbalanced magnetron sputtering.The influence of the deposition conditions,including but not limited to the Si-transition layer,thickness,pressure and deposition rate,on the surface microstructures and mechanical properties and interfacial adhesion was investigated with scanning electron microscopy,energy dispersive spectroscopy,Raman spectroscopy and conventional mechanical probes.The results show that the Sitransition layer significantly affected the surface mechanical properties and interfacial adhesion but little influenced the microstructures of DLC coatings.For instance,the DLC coating with Si-transition layer outperforms the DLC films with stronger interfacial adhesion,better wear-resistance,higher micro-hardness and smaller friction coefficient.