石墨靶和钛靶共溅射制备的TiCN薄膜的结构和性能

Growth of TiCN Coatings by Co-Sputtering of Graphite and Titanium Targets

在氮气和氩气的混合气氛下通过共溅射石墨靶和钛靶在M2高速钢基体上制备TiCN薄膜,利用扫描电子显微镜和X射线衍射仪分析TiCN薄膜的组织与结构,采用纳米压痕仪检测TiCN薄膜的硬度,同时采用压痕法和划痕法评价薄膜与基体的结合状况,并对TiCN薄膜丝锥进行切削试验,考察TiCN薄膜的耐用性。结果表明:TiCN薄膜中的C原子以固溶于TiN晶格形式存在,TiCN薄膜在(111)晶面的取向较TiN薄膜明显减弱,TiCN薄膜的断口为长块状结构,其横向尺寸较TiN薄膜小,TiCN薄膜表面呈凹凸状。TiCN薄膜与基体的结合力为40N左右,C原子在TiCN薄膜中具有固溶强化和细晶强化作用,TiCN薄膜的硬度由TiN薄膜的20.3提高到33.4GPa。TiCN薄膜具有良好的减摩性能,攻丝40Cr材质时TiCN薄膜丝锥的使用寿命较TiN薄膜丝锥和无涂层丝锥明显提高。

The TiCN coatings were deposited by magnetron co-sputtering of graphite and titanium targets on substrates of M2high-speed steel.The influence of the C-doping on the microstructures and mechanical properties of the TiCN coatings were investigated with X-ray diffraction,scanning electron microscopy,energy dispersive spectroscopy and mechanical probes.The surface-modified taps were tested.The results show that the TiCN coatings outperform the TiN films with higher micro-hardness,better wear-resistance,lower friction coefficient and longer service life.For example,the hardness of TiCN coatings increased from20.3GPa of the TiN films to 33.4GPa,possibly because of strengthening by formation of finer grains and by solid solution of C atoms.When cutting 40 Cr plates,the service-life of the TiCN coated tap was 3and 1.6times longer than that of the TiN modified and steel taps,respectively,simply because carbon transfer-films,formed on the TiCN surfaces,acted as solid lubricant,reducing the friction coefficient.