摘要
应用两种结构类似的二维纳米薄膜材料石墨烯和MoS2纳米片设计了一种新型异质结器件.首先利用磁控溅射方法制备出MoS2薄膜,然后在MoS2薄膜上利用化学气相沉积法(CVD)法制备石墨烯;进而采用磁控溅射法沉积铜(Cu)接触电极,并进行表征与测试.在适当的工艺条件下,石墨烯和MoS2结合能够形成具有线性伏安特征的异质结.
This paper was designed a new hetero-junction device applications that similar structure of the two-dimensional nano film material graphene and MoS2. MoS2 film was prepared by magnetron sputtering method, graphene was prepared by CVD method on MoS2 film,and then copper（Cu） metal contact electrodes was deposited using the Magnetron sput- tering method,thus graphene/MoS2 heterojunction was formed.
出处
《陕西科技大学学报（自然科学版）》
2015年第3期63-67,104,共6页
Journal of Shaanxi University of Science & Technology
基金
国家自然科学基金青年项目(51302161)
