精密导轨定位误差分析与误差建模

Positioning Error Analysising and Synthesis Modeling of the Slideway

为了提高导轨的定位精度,完整的分析定位误差产生的原因并建立综合误差模型,结合定位误差中热误差部分与几何误差部分的各自性质,通过定位误差实验,分析在不同温度下平动轴的定位误差数据,完成了其几何误差部分与热误差部分的分离。通过对热误差的分析建立了定位误差的综合模型,该模型能准确预测平动轴的定位误差,预测精度在(-3.20um,+1.92um)。

In order to improve the positioning accuracy of the translation axis, a complete analysis of the causes of the positioning errors and establish a synthesis error model.With the measurements of positioning error and different characteristics of geometric error and thermal error, separating the geometric error and thermal error based on the positioning error data at different temperatures.A synthesis error model is established through the analysis of the thermal error. This model can predict the positioning error of the translational axes, the prediction accuracy range from -3.20um to 1.92um