寄生式时栅传感器自标定方法研究

Investigation on self-calibration method of parasitic type time grating sensor

研究寄生式时栅传感器自标定方法,对解决寄生式时栅的现场标定基准和精度保持具有重要理论和实践意义。将圆周封闭的自然基准转移到定角的比较值中,再利用傅里叶级数性质将定角平移到幅值和相位中,建立了测量值和误差之间的内在联系,从而建立自标定模型。在此基础上进行了实验研究,并与光栅数据进行比对测量来检验自标定的精度,最终获得优于6″的自标定精度。该方法实现了角位移传感器双读数头的自标定,使用条件宽松,与其他方法相比更易于实现生产现场的应用。

Self-calibration method of parasitic type time grating sensor is investigatedwhich is important for solving calibrating basis and keeping accuracy of parasitic type time grating in theory and practice. Intrinsic relationships between measurements and errors are established by shifting circle-closed natural base to comparison values of fixed angle,which is shifted to amplitudes and phases by properties of Fourier series. A model of self-calibration is established and experimental investigations are carried out. Self-calibration accuracy is checked by comparing measurements with optical grating. The final accuracy of self-calibration of parasitic type time grating is better than 6 ″. The method realizes self-calibration of angle displacement sensors with double reading heads. Furthermore,application conditions of the method are not harsh,and its application in manufacturing field is easier to realize by comparing with other methods.