一种量化的激光位移传感器倾角误差补偿模型

A quantitative error compensation model of the inclination angle of the laser displacement sensor

激光位移传感器具有非接触、测量范围大、测量效率高等优点,广泛应用于精密检测领域。然而,倾角误差是影响激光位移传感器测量精度的主要因素之一,为了提高激光位移传感器的测量精度,有必要对其进行分析研究,推导出能够在工程中应用的可量化的倾角误差补偿模型。首先从激光三角法测量原理开始,深入分析了激光光束的光路和光强损失的原因,然后根据光路的几何特征建立了物像方程,从倾角误差机理推导出一种可量化的误差模型,最后用激光干涉仪和正弦规在四坐标测量仪上。对激光位移传感器进行了倾角误差实验,把测量得到的数据经误差模型修正后,可以将传感器的测量精度控制在10μm以内。结果表明,所提出的倾角误差模型准确有效,在对复杂曲面的测量应用中,具有一定的使用和推广价值。

Laser displacement sensor is an effective measuring instrument widely used in the field of precision testing. It is characterized that non-contact,large measuring range and high measuring efficiency. However,the measurement accuracy is affected by the incidence angle. In order to improve the measurement accuracy of the laser displacement sensor,it is necessary to carry out analysis and deduced a quantifiable error-compensation model of the incident angle. Based on the principle of laser triangulation measurement,the optical path of the laser beam to be analyzed and reason for the loss of light intensity is found. The equation of object and image is established according to the geometric characteristics of the optical path. A quantifiable error-compensation model is proposed from the angle of error mechanism. Finally,experiment was completed with laser interferometer and sine gauge on CMM,by introducing error model. The experimental result is improved,and the measurement accuracy is not greater than 10 μm. Results show that the model inclination error is