激光热力效应对不同材料电化学刻蚀形貌的作用研究

Analysis of Laser Thermal-Mechanical Effect on Morphology of Electrochemical Etching on Various Materials

在所构建的纳秒脉冲激光电化学复合加工(LECM)系统中,利用激光辐照和脉冲电化学复合加工的方法,在相同的工艺参数下,分别对304不锈钢、7075铝合金、1060纯铝等金属和脆性材料硅进行了加工试验。探讨了激光热力效应促进电化学加工的机理,并对不同金属材料的极化曲线进行了测量。通过扫描电子显微镜(SEM)对比分析了不同材料复合加工表面的微观形貌;并通过超景深三维显微镜对不同材料的加工深度、宽度与深宽比进行了分析。试验结果表明,在激光热力作用下,铝合金的电化学刻蚀质量和表面形貌较好,且可以加工出深宽比较大的微结构;脆性材料则存在微颗粒的冲击崩离。

In the established nanosecond pulse laser electrochemical machining （LECM） system, a compound processing method of laser and electrochemistry is used to process metals such as 304 stainless steel, 7075 aluminium alloy, 1060 aluminium and brittle materials like silicon under the same processing parameters. The mechanism of the laser thermal-mechanical effect on promoting electrochemical machining is investigated. The polarization curves of different materials are measured. The compound processing surface morphologies of different materials are comparatively analyzed by scanning electron microscope （SEM）. A VHX- 1000 three- dimensional super depth digital microscope is adopted to analyze the processing depths, widths and aspect ratios of different materials. The results indicate that under the action of laser thermal-mechanical effect, the electrochemical etching quality and surface morphology of aluminum alloy are better than those of stainless steel and aluminum. And relatively large aspect ratio microstructure can be processed. Besides, the shock calving of microparticle occurs to the brittle materials.