提高非接触式细丝直径测量精度的技术和方法探讨

The Discussion of Technique and Method for Improving Noncontacting Measurment Precision of Threod's Diameter

基于 Fraunhofer衍射和 Babinet原理可以实现用激光作为光源的细丝直径非接触高精度测量 .理论计算和实验表明影响细丝直径测量精度的因素包括 :衍射条纹宽度的测量、入射光波E取向和 CCD的横向移动等 .从 Maxwell方程出发 ,根据被测细丝表面的边界条件求出衍射场 ,从而进一步讨论 E的取向对细丝测量精度的影响 .

The precision of noncontacting measurement of thread ′s diameter, in which laser is used as light source, can be improved based on Fraunhofer diffraction and Babinet theory. The measurement of diffraction fringe width, the tropism of incident light E and the transverse displacement of CCD are the main factors that influence this precision from the study of theoretical arithmetic and experiment. From the Maxwell equation, the diffracted field has been solved using boundary condition of the thread surface, and then the influence of tropism of E has been discusseed.