还原炉生产多晶硅常见问题及对策探讨

Common Problems and Countermeasures of Polysilicon Production in CVD Reactor

在使用改良西门子法生产多晶硅的过程中,还原生产工艺是最关键的工艺,而还原炉运行成功与否最终关系到生产成本和企业效益。通过对启炉及运行过程中硅芯倒伏、倒炉、电器与设备故障等问题进行总结和分析,发现硅芯质量与安装水平、系统常规检查与维护、以及工艺控制水平和精细化程度等是影响还原炉运行成功率的主要原因,本文对问题控制方法进行了探讨,以期为提高还原炉运行稳定性提供参考。

In the manufacturing process of polysilicon by the improved Siemens method, deposition objectives for polysilicon is a key technology and process, while the operation is successful or not is related to the cost and benefit for the company. The causes of polysilicon filaments and rods inclining in the CVD reactor were analyzed, appliances and equipments fault and other issues were also discussed. The quality and installation of filaments, and routine examination and maintenance of system, and the level and precision of operation are the main reasons which affected success of running. The countermeasures were discussed in this article, according to those measures, the stability of the deposition process would be improved.