柔性ZnO基透明导电薄膜的研究进展

Progress of ZnO-Based Transparent Conductive Films Deposited on Flexible Substrate

在柔性衬底上制备的Zn O基透明导电薄膜具有优异的光电性能,已引起广泛关注并成为当前的研究热点。综述了近年来国内外在柔性Zn O基透明导电薄膜方面的研究进展,介绍了不同制备方法及工艺参数对柔性Zn O透明导电薄膜结构及光电性能的影响,并对当前存在的问题及未来工作进行了分析。

ZnO thin films deposited on flexible substrate become a focus research owing to their out- standing electrical and optical properties. Electrical and optical performances of flexible ZnO-based thin films prepared by different fabricate methods and various processing parameters in recent years were reviewed. At the same time, the existing problems for the flexible ZnO-based thin films and the future works were also discussed.