TDLAS湿度传感器与维萨拉湿度传感器性能对比研究

Comparative Study Between TDLAS Humidity Sensor and VAISALA Humidity Sensor

水汽含量对于诸如文物保护、气象、工业生产等领域都有明确标准并需要严格控制,因此能够精确和快速的实现环境湿度监测已成为一大研究热点。现在常用的湿度传感器为芬兰VAISALA生产的湿度传感器系列,但是其测湿部分采用聚合物高分子薄膜电容传感器,存在响应时间长,褪湿慢等缺点,已经不能满足用户需求。基于TDLAS技术的湿度传感器使用半导体激光器作为光源,参考气室提供光谱调节反馈,构成了一种高精度水汽含量检测系统,响应速度快,灵敏度高,可以克服传统湿度传感器的不足。该文以米歇尔露点仪为标准,对比测试了TDLAS湿度传感器与传统的VAISALA电容传感器响应时间、测量精度等性能。证明了TDLAS湿度传感器具有更好的测量准确度与灵敏度。

Water vapor content must be measured accurately and controlled strictly in areas such as cultural relics protection, meteorology, industrial produetion,etc.So, it becomes a research hotspot that to monitor environment humidity rapidly and accurately.Now,the most commonly instruments used to measure humidity are the VAISALA humidity sensors,but the moisture part of VAISALA depend on the capacitance sensor, which made by macromolecule polymer film.These humidity sensors have many disadvantages in the actual measurement, such as response slow,measurement inexact etc.The TDLAS humidity sensing system uses semiconductor laser as light source, and has a reference gas cell to provide feedback.In this paper, the MICHELL dew-- point instrument is used as standard of humidity measurement,and the contrast experiment between the TDLAS sensing system and the VAISALA sensor is present, which proves that the former has better measurement accuracy and repeatability, and can overcome the shortcomings of traditional humidity sensors.