石英摆片激光切割技术研究

Study of Laser Cutting Technique for Flexure Processed from Quartz

针对激光切割技术在典型石英结构——加速度计摆片加工成形中的应用,探讨了激光与石英材料的作用机理,进行了激光切割成形以及消应力试验。在此基础上详细分析了激光切割工艺参数和后处理对石英摆片成形质量的影响,对精密石英结构的制造具有普遍的意义。

This paper focuses on the application of laser cutting technique in the typical quartz structure of flexure of quartz flexible accelerometer. The reaction mechanism of laser and quartz is discussed. Based on the manufacture experiments of a flexure from laser cutting, the influence of technological parameter to the quality of flexure is analyzed. The stress relaxation of quartz after laser cutting is also discussed.