摘要
分析了激光直线度干涉仪的原理,阐述了在激光直线度干涉仪中用Wollaston棱镜作为感知元件的合理性,证明了系统对光束漂移有自适应性,能够实时消除漂移误差,有较强的抗干扰性。
The principle of a laser interferometer for straightness measurement is introduced. It demonstrates that a Wollaston prism can be used as the sensing component in the laser interferometer for straightness measurement. The pro- posed system has the self-adaptability to the drift of laser beam, and this drift error can be eliminated in real time. As a re- sult, the system is more robust to disturbance.
出处
《工具技术》
北大核心
2015年第5期101-103,共3页
Tool Engineering
关键词
直线度
激光干涉仪
straightness
laser interferometer
