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Crystallization kinetics of Sn_(40)Se_(60) thin films for phase change memory applications

Crystallization kinetics of Sn_(40)Se_(60) thin films for phase change memory applications
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摘要 The crystallization kinetics of Sn4oSe6o thin films has been successfully investigated using sheet resis- tance versus temperature measurements. Thermal evaporation was used to deposit the films on ordinary glass sub- strates. The crystallization temperature for Sn4oSe60 thin film was found to be 156.6 -t- 0.3 ~C. In the as-deposited state, the sheet resistance was found to be 195 Mf2/[2, this value declined to 1560 f2/[2] upon annealing. The value of activation energy obtained from the Kissinger plot was 0.62 + 0.07 eV. From the results obtained, SnaoSe60 is a promising alloy for PCM application because of its high electrical contrast, high crystallization temperature, and relatively high activation energy. The crystallization kinetics of Sn4oSe6o thin films has been successfully investigated using sheet resis- tance versus temperature measurements. Thermal evaporation was used to deposit the films on ordinary glass sub- strates. The crystallization temperature for Sn4oSe60 thin film was found to be 156.6 -t- 0.3 ~C. In the as-deposited state, the sheet resistance was found to be 195 Mf2/[2, this value declined to 1560 f2/[2] upon annealing. The value of activation energy obtained from the Kissinger plot was 0.62 + 0.07 eV. From the results obtained, SnaoSe60 is a promising alloy for PCM application because of its high electrical contrast, high crystallization temperature, and relatively high activation energy.
机构地区 Department of Physics
出处 《Journal of Semiconductors》 EI CAS CSCD 2015年第6期17-20,共4页 半导体学报(英文版)
关键词 crystallization temperature activation energy electrical contrast phase change memory crystallization temperature activation energy electrical contrast phase change memory
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  • 1Yamada N, Ohno E, Nishiuchi K, et al. Rapid phase transitions of GeTe-Sb2Te3 pseudobinary amorphous thin films for an opticaldisc memory. J Appl Phys, 1991, 69(5): 2849.
  • 2Tominaga J, Kikukawa T, Takahashi M, et al. Structure of the op- tical phase change memory alloy, Ag-V-In-Sb-Te, determined by optical spectroscopy and electron diffraction. J Appl Phys, 1997, 82(7): 3214.
  • 3Raoux S, Jordan-Sweet J L, Kellok A J. Crystallization proper- ties of ultra-thin phase change films. J Appl Phys, 2008, 103(11): 114310.
  • 4Ovshinsky S R. Reversible electrical switching phenomena in disordered structures. Phys Rev Lett, 1968, 21(20): 1450.
  • 5Pirovano A, Redaelli A, Pellizzer F, et al. Reliability study of phase change nonvolatile memories. IEEE Trans Device Mater Reliab, 2004, 4(3): 422.
  • 6Burr G W, Breitwisch M J, Franceschini M, et al, Phase change memory technology. J Vac Sci Technol, 2010, 28(2): 223.
  • 7Raoux S. Phase change materials. Annual Review of Material Research, 2009, 39:25.
  • 8Adler D, Shur M S, Silver M, et al. Threshold switching in chalcogenide glass thin films. J Appl Phys, 1980, 51(6): 3289.
  • 9Redaelli A, Pirovano A, Pellizer E, et al. Electronic switching ef- fect and phase change transition in chalcogenide materials. IEEE Electron Device Lett, 2004, 25(10): 684.
  • 10Ielmini D, Zhang Y G. Analytical model for sub-threshold con- duction and threshold switching in chalcogenide based memory devices. J Appl Phys, 2007, 102(5): 054517.

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