摘要
A quantitative comparison of multiline TRL （thru-reflect-line） and LRM （line-reflect-match） on-wafer calibrations for scattering parameters （S-parameters） measurement of InP-based PHEMTs is presented. The com- parison is undertaken for the first time and covers a frequency range from 70 kHz to 110 GHz. It is demonstrated that the accuracy of multiline TRL and LRM calibration is in good agreement. Both methods outperform the conven- tional SOLT calibration in the full frequency band up to 110 GHz. Then the excellent RF performance is obtained by extrapolation on the basis of inflection point, including a maximum current gain cut-off frequency ft of 247 GHz and a maximum oscillation frequency fmax of 392 GHz. The small-signal model based on LRM calibration is es- tablished as well. The S-parameters of the model are consistent with the measured from 1 to 110 GHz.
A quantitative comparison of multiline TRL （thru-reflect-line） and LRM （line-reflect-match） on-wafer calibrations for scattering parameters （S-parameters） measurement of InP-based PHEMTs is presented. The com- parison is undertaken for the first time and covers a frequency range from 70 kHz to 110 GHz. It is demonstrated that the accuracy of multiline TRL and LRM calibration is in good agreement. Both methods outperform the conven- tional SOLT calibration in the full frequency band up to 110 GHz. Then the excellent RF performance is obtained by extrapolation on the basis of inflection point, including a maximum current gain cut-off frequency ft of 247 GHz and a maximum oscillation frequency fmax of 392 GHz. The small-signal model based on LRM calibration is es- tablished as well. The S-parameters of the model are consistent with the measured from 1 to 110 GHz.
基金
Project supported by the National Natural Science Foundation of China(No.61275107)
