摘要
精密孔径测量仪是一台以长光栅为标准，利用光电瞄准技术进行非接触绝对测量的高精度测长仪器；主要用于测量内孔直径，还可以用于测量轴径、两平行平面距离及玻璃尺刻线间距等。文中主要研究测量范围为（0～200） mm，分辨力为0.1μm的精密孔径测量仪的检定方法。
Owing to taking optical long grating as a standard and using photoelectrical aligning , the precision aperture measuring instrument （PAMI） is a high precision non-contact absolute-length measuring instrument. This verification method is suitable for the verification of the precision aperture measuring instrumen （PAMI） with （0~200） mm of measuring range and 0.1μm of resolution. The method prescribes the metrological characteristics , verification items , verification methods, verification procedure and processing of verifying results for PAMI.
出处
《机械工程师》
2015年第6期159-162,共4页
Mechanical Engineer
基金
航空科技成果项目(1991航技签字262号)
关键词
精密孔径测量仪
长光栅
光电瞄准
非接触
绝对测量
precision aperture measuring instrument
long grating
photoelectrical aligning
non-contact
absolute-length measuring
