摘要
针对0.8NBT-0.2KBT无铅压电陶瓷应用于谐振式传感器,研究其薄方片振子厚度伸缩振动与其他振动的耦合情况,通过计算关键技术参数分析其在微天平传感器上的应用性。确定峰形激发最高、耦合最小的压电振子长厚比为9.5∶1,与同尺寸石英晶体微天平(QCM)相比,该谐振体应用于传感器理论灵敏度降低70.1%,理论有效测量范围提高129%。
In view of the 0.8NBT-0.2KBT lead-free piezoelectric ceramics used in resonant sensor, the coupling of the thickness stretching vibration and other vibration in thin square piece oscillator which has different length to thickness ratio was researched, the technical parameters of this vibration mode were counted to analyze the practicability of this mode used in resonant sensor. It is determined that the length to thickness ratio of the piezoelectric vibrator with highest coupled and smallest resonant peak is 9.5 : 1. Comparing with the same size of QCM, when this resonance body is applied to the sensor, the theoretical sensitivity is reduced 70.1%, while the effective range theo- ry t is improved 129%.
出处
《压电与声光》
CSCD
北大核心
2015年第3期416-419,共4页
Piezoelectrics & Acoustooptics
基金
国家自然科学基金资助项目(51372197)
陕西省重点科技创新团队基金资助项目(2014KCT-04)
关键词
无铅压电陶瓷
厚度伸缩模态
谐振式传感器
耦合
参数
lead-free piezoelectric ceramics
thickness stretching mode
resonant sensor coupling
parameters