摘要
矢量传声器的核心组成器件是质点振速传感器,该传感器具有与频率无关的‘8'字指向性。本文在分析空气声质点振速传感器工作原理基础上,采用数值分析方法系统研究了质点振速传感器中敏感头桥式结构尺寸、热扩散和材料比热容等参数对频率响应的影响,着重分析了质点振速传感器最优灵敏度和低通滤波器效应。根据优化设计结果,采用MEMS工艺技术加工出敏感头桥式结构,并测试了0℃条件下Pt的电阻值R和热阻温度系数θ,以及传感器的频响曲线和‘8'指向性。实验结果表明:空气声质点振速传感器具有良好的声学性能。
In the airborne sound field, the particle velocity sensor with the feature of figure-of-eight directivity inde- pendent of sound frequency is the core component of vector sensor. The working principle of airborne particle velocity sensor in ways of numerical analysis, and effects as optimal sensitivity and low-pass filter on the frequency response due to the size of sensor head bridge structure, heat diffusion and specific heat capacities of materials are systematically presented here. The sensor head bridge structure is made by a serial of experimental MEMS process, the O^C resistance value R0 and the thermal coefficient of resistance 0 of Pt are tested then, and finally the frequency response and the figure-of-eight directivity of the sensor are obtained. As a result, this airborne particle velocity sensor is of good acousticM characteristics.
出处
《声学学报》
EI
CSCD
北大核心
2015年第4期598-606,共9页
Acta Acustica
基金
中国电科技术创新基金(JJ120213)资助
