一种双桥臂微悬臂梁谐振频率的影响因素研究

Study on the influencing factor of resonance frequency for microcantilever with double beams

为了获得双桥臂硅微悬臂梁的谐振频率随其质量块尺寸的变化规律,首先推导出了双桥臂硅微悬臂梁谐振频率的解析式,并对9组不同尺寸的双桥臂单晶硅微悬梁的谐振频率随附加质量块长度的变化规律进行了分析.结果表明,随着附加质量块长度的增加,悬臂梁的固有频率会逐渐地减小,并且随着质量块长度所占微悬臂梁总长度比例的增大,附加质量所引起的微悬臂梁谐振频率的变化量在总谐振频率中所占的比重呈逐步减小的趋势.

In order to obtain the relationship between the changes of resonance frequency of microcantilever with double beams and the dimensions of added mass, the formula of resonance frequency of microcantilever with double beams was deduced.In addition, using the samples of nine kinds of microcantilevers with double beams, the relationship between the lengths of added mass and the resonance frequencies was analyzed.The results show that the resonance frequency of microcantilever decreases with the increasing length of added mass.Moreover, when the ratio of the length of added mass versus the total length of microcantilever increases, the ratio of the in-duced resonance frequency by added mass versus the resonance frequency of microcantilever decreases.