老炼对集成电路静态电源电流的影响

Burn-in Effects on Direct Drain Quiescent Power Current of the Integrated Circuit

为使用户得到更可靠的集成电路产品,老炼是目前最常用和最有效的一种可靠性筛选试验方法。介绍了集成电路老炼的意义和试验方法,通过研究正常CMOS器件和有工艺缺陷的CMOS器件的静态电源电流随老炼时间的变化曲线,经在老炼过程中多次不同时间测试得出的实验数据,可以清楚地发现器件的早期失效情况。经过分析后可以很好地反馈到器件的生产加工过程中,为集成电路的设计、加工和生产提供良好的数据依据,使集成电路加工工艺不断改善和元器件品质不断改进。指出了老炼在集成电路生产过程中的指导作用,是提高集成电路可靠性的有效手段。

In order to provide the reliable IC products for users,the burn -in is the most common and effective method of reliability screening test.The paper describes the meaning and methods of burn -in for integrated circuit.By studying the curve changing with the direct drain quiescent power current of the normal COMS devices and abnormal ones and the test data in different times during burn -in test,the early failure of the device can be clearly found.After analysis of the devices,it can be fed back to the production process to provide good data basis for the IC design,processing and production and improves the processing of the integrated circuit and the quality of components.The burn -in is presented to guide the IC production process and comes into an effective means to improve reliability of integrated circuit.