摘要
设计了一种转塔式测试分选机,用于极小型半导体器件的测试、打标、分选和编带。此设备处理速度快,检测分选效率高,对半导体器件损伤小,可以大规模用于极小型半导体器件的测试分选。
A turret testing sorter was designed for testing, marking, sorting and braiding of mini-semiconductor devices. This sorter enjoyed a fast handling speed and high efficiency in testing and sorting,and did little damage to the semiconductor devices,which made it extensively applicable for testing and sorting of mini-semiconductor devices.
出处
《江苏工程职业技术学院学报》
2015年第2期1-3,共3页
Journal of Jiangsu College of Engineering and Technology
基金
国家科技重大专项"极大规模集成电路制造装备及成套工艺"(编号2009ZX02010-26)