闭式T形工作台结合面结构对气浮导轨性能的影响

The Effects of the Interface Structure Fit on the Aerostatic Guideway Performance of T-Type Air Bearing Table

闭式T形工作台在加工过程中选择不同的工艺方法导致结合面结构变化对气浮导轨性能的影响是不容忽视的。通过建立一体式和组合式两种结构的气浮导轨气膜面有限元模型,对其压力场分布、承载力、刚度和耗气量进行分析、对比。通过分析发现:砂轮越程槽会影响气膜结合面处的压力场分布,进而造成导轨承载能力的变化,但对耗气量的影响并不明显;与一体式导轨结构相比,组合式导轨结构明显提高了各气膜及导轨的承载力。结果表明:使用组合式的结合面结构形式不但能降低加工难度和材料成本,还能获得较大的承载力。

During the T-type air bearing table production,different processes would let the interface structure change. The effect caused by this kind of change can not be ignored on the aerostatic guideway performance. In order to analyze the pressure distribution,load capacity,stiffness and gas consumption of guideway,the finite element model of integrated and modular air bearing has been established. The analysis revealed that the relief grooves for grinding wheels would affect pressure distribution and then change load capacity,but it is not obvious influence on the gas consumption. Compared with integrated air bearing,modular air bearing raise the load capacity obviously. The comparative analysis show that the modular air bearing not only can reduce costs and processing difficulty,but also has larger load capacity.