反应离子束刻蚀工艺制作闪耀罗兰光栅

Fabrication of Blazed Rowland Grating by Reactive Ion Beam Etching

相比类矩形槽罗兰光栅，闪耀罗兰光栅的衍射效率较高，更有利于光谱分析仪器的设计与应用，而国内外尚无产品级闪耀罗兰光栅产品．本文通过类矩形槽形及闪耀槽形的衍射效率优化设计及对比，获得了闪耀槽形优化设计结果；利用反应离子束刻蚀设备制作出3块200～450nm波段、线密度为2400gr／mm、口径为（b63．5mm的闪耀罗兰光栅，其中光栅2的峰值衍射效率达到了65％@220nm，较HORIBA Jobin Yvon公司生产的类矩形槽罗兰光栅产品整体衍射效率高25％，与理论衍射效率相当．实验结果表明，本文所采用的反应离子柬刻蚀工艺可实现高衍射效率闪耀罗兰光栅制作，且工艺可控、稳定，所制作的闪耀罗兰光栅衍射效率高于国外同类产品．

The development and application of spectrum instruments has been seriously restricted due to the low diffraction efficiency of rectangular Rowland gratings at short wave. The blazed Rowland grating, in contrast, enjoys higher diffraction efficiency. However, its research is inadequate at home and abroad. Through optimization design of rectangular and blazed gratings, blazed Rowland grating design result with high diffraction efficiency at short wave was obtained. Using reactive ion beam etching, three blazed Rowland gratings were fabricated with wave band of 200---450 nm, linear density of 2 400 gr/mm, and caliber of ~63.5 mm. The peak diffraction efficiency of blazed Rowland grating 2 achieved 65% @ 220 nm, which is 25% higher than that of rectangular Rowland grating produced by HORIBA Jobin Yvon Inc. , and equal to theoretical diffraction efficiency. The experimental result indicates that the blazed Rowland gratings fabricated through reactive ion beam etching process have higher diffraction efficiency than the similar overseas products, and the process is controllable and stable.