时栅角位移传感器自动检定系统

Automatic Verification System for Time Grating Angular Displacement Sensors

针对时栅角位移传感器产业化过程中产品质量检定环节采用人工检定方式导致工作效率低且容易产生漏记、错记进而影响产品质量检定的问题,研制了时栅角位移传感器自动检定系统。系统采用PMAC作为运动控制单元,以直驱电机作为驱动机构,有效减小传动环节误差,质量检定选用ELCOMAT3000型双轴电子自准直仪,全量程检定误差小于±0.25″。构建了参数化的直线梯形加速运动模型与产品质量检定算法,整个产品质量检定全部自动完成,检定精度高,工作效率得到有效提升,产品质量得到可靠的保证。

In order to resolve the problem of low efficiency and verification quality in the procedure of time grating angular displacement sensor quality verification due to manual reading mode, an auto- matic verification system for time grating angular displacement sensor was proposed. In the automatic verification system, the PMAC was selected as motion control unit and the direct driving motor was used as the driving equipment to reduce the transmission errors. The electronic autocollimators ELCO- MAT3000 with errors less than ±0.25” acts as the precision measuring instrument in the system. A programmable linear trapezoidal acceleration motion model was presented in the motion control and one product quality verification algorithm was proposed to improve the quality verification. The ex- perimental results show that the steps of product quality certification all are completed automatically and the accurate results of quality verification is obtained. The work efficiency is improved greatly and product quality of time grating angular displacement sensor is assured further.