摘要
为改善晶体硅太阳电池表面存在的问题,利用等离子增强化学气相沉积法在晶体硅上沉积的三层氮化硅薄膜,对晶体硅太阳能电池起到很好的减反射效果,明显改善了电池对入射光的吸收。将三层薄膜的连续沉积改为间断性沉积,可以使氮化硅薄膜的致密性大大提高,并极大的改善了原本工艺中出现的电池表面色差较严重的问题。
To improve the problems existed in thesurface ofthe crystalline silicon solar cell, PECVDis usedin depositingthreelayer of silicon nitride film at silicon depostition This method can decrease the optical reflection ofcwstalline silicon solar c ells, and improve the absorption of incident light I fth e con - tinuoths deposition of three layer film is changed to intermittent deposition can greatly improve the density of silicon nitride thin fihns, and gready improvedthe problemofthe suface color difference ofthe solar cellin the originalprocess.
出处
《科技风》
2015年第15期64-65,共2页
关键词
氮化硅薄膜
晶体硅太阳电池
间断性沉积
Sihconnitridethinfihn
Crystallinesiliconsolarcells
Intermittentdeposition
