中间层热处理温度对VO_2/TiO_2复合薄膜热致相变性能的影响

Effects of Interlayer Annealing Temperature on the Thermochromic Properties of VO_2/TiO_2 Thin Film

通过溶胶凝胶法在云母表面制备了Ti O2中间层薄膜,再在中间层上制备了VO2薄膜。通过视频光学接触角测量仪检测Ti O2薄膜的亲水性,利用XRD、傅立叶红外光谱仪和紫外可见分光光度计对复合薄膜的结构及光学特性进行分析。试验表明,紫外光激发后的Ti O2薄膜具有良好的亲水性,能够实现V溶胶的均匀涂覆。Ti O2中间层经510~560℃退火后,复合薄膜沿（011）晶面择优取向生长,复合薄膜红外屏蔽效能高,相变温度及滞后温宽都较低。中间层经460℃退火后的复合薄膜沿（111）晶面取向生长,红外屏蔽效能达到92%以上。

Ti O2 interlayer was deposited on the mica substrate,and the VO2 film was fabricated on the Ti O2 interlayer under UV light irradiated. Video-based contact angle measuring device was used to analyze the hydrophilicity of the Ti O2 interlayer. XRD,FTIR and UV-vis were used to analyze the microstructure and the thermochromic properties of the VO2/ Ti O2 composite films. The results suggest that the hydrophilicity of the Ti O2 film can be enhanced under ultraviolet excitation,and it is beneficial to coat V sol film uniformly on the Ti O2/ mica substrate. The VO2/ Ti O2 composite films grow in a preferred orientation along the（ 011） direction under 510 ~ 560 ℃ of Ti O2 interlayer heat treating temperature. The transition temperature and hysteresis width of the composite films are reduced. The composite films grow in a preferred orientation along the（ 111） direction under 460 ℃ of annealing temperature for the Ti O2 interlayer,with more than 92% of shielding efficiency.