一种棱边共面度气动测量系统的设计

Design of Pneumatic Measurement System for Edge Coplanarity Error

提出了一种基于差压式气动测量原理的滑阀节流棱边共面度误差的非接触式测量方法,建立了基于该方法的自动测量系统,并进行了实验研究。实验结果表明,滑阀节流棱边共面度气动测量系统的测量误差不超过0.5μm,差压式气动测量方法完全能够满足滑阀节流棱边共面度误差实际测量的精度要求。

A new measurement method is put forward based on pneumatic measuring principle of differential pressure approach, and the automatic measuring system is developed according to the proposed method which realizes non-contact and high accuracy measurement for throttling edge coplanarity error,and then the actual measuring experiments for four groups of throttling edge are carried out. Experiment and analysis results shows that the measuring error of the developed system does not exceed 0.5μm and the pneumatic measuring method satisfies absolutely the requirement of high precision measurement for th,＇ottling edge coplanarity error.