摘要
介绍了多轴压电转换(PZT)型微机械系统(MEMS)陀螺仪的工作原理及其特点,并给出了一种与之相对应的专用集成电路ASIC前端电路的设计方法。首先要驱动该类型陀螺仪使之进入共振模式,只有当陀螺仪处于共振模式时,检测到的信号才是真正的角速度信号。ASIC前端电路是MEMS器件和后续电路的接口部分,需要将MEMS产生的电荷信号转换成电路可处理的电压信号。该前端电路还对检测到的信号进行了关键处理,降低了后续电路的设计难度。
The principle and characteristics of a multi- axial piezoelectric transducer（ PZT） micro- electromechanical system（ MEMS） gyroscope are introduced. A way todesign the front- end circuit of the application specific integrated circuit（ ASIC） which can work with this MEMS is also provided. This type of gyroscope must bedriven into resonance mode first and then real angular velocity can be detected. The front- end circuit of the ASIC is the interface that connected MEMS with the other circuits. It can transfer the charges produced by the MEMS to voltage signals which can be handled by the circuit. The front- end circuit also deal swith some key issues for the detected signals, which makes the design of the following circuits much easier.
出处
《中国集成电路》
2015年第7期30-34,70,共6页
China lntegrated Circuit
