曝光机里的光路计算和绝对平行光的设计

Optical path calculation in exposure machine and absolute parallel light design

文章分两部分,第一部分是在牛顿光学的基础上导出了曝光光路的平行度、曝光能量的计算公式,这些公式完全是在牛顿几何光学的框架下推导出来,没有任何假定的成分,完全适用于曝光光路的计算。第二部分则是绝对平行光的光路的设计,它一改传统PCB曝光光路设计理念,巧妙地用点光源-平面-蝶面光路图,这样不仅得到了绝对平行光,而且是比传统设计方案强得多的光。

This article was divided into two parts. The first part deduced optical parallelism, exposure energy of calculation formula which is based on Newtonian optics. These formulas is completely based on geometrical optics of Newton without any supposing composition. They are applicable in calculating optical path of exposure. The second part is about absolute parallel optical path design. It changed tradition design principle of optical path in PCB profession, skillfully used dot-source plane butterfly surface to constitute optical diagram, which not only get absolute parallel light, and is stronger than tradition design.