浅谈多晶硅项目设备管道的清洗方法

Discussion on Equipment Pipe Cleaning Methods in Polysilicon Project

结合某3 000 t/a多晶硅改良西门子三氯氢硅还原生产法项目,说明设备管道高清洁度要求的重要性,阐述了在安装施工过程中对其不同材质、类型、质量要求的设备管道进行清洗的喷淋法、循环法、浸泡法、擦拭法等相应的清洗工艺方法、关键工序、适用对象及质量验收标准,从而保证了此多晶硅项目的顺利投产,产品质量也达到了设计要求。

Combined with a 3 000 t/a project of polysilicon - improved Siemens trichlorosilane reduction method, the importance of high requirements for equipment pipe cleanliness was illustrated. Aiming at various materials,types and quality requirements of equipment pipes in installation and construction, relevant cleaning methods （ e-·g. spraying method, circulation method, soaking method, wipe method, etc. ）, key process, applicable targets and quality acceptance standards were described. And thus this project was put into operation successfully and the product quality meets the design requirements.