改进型的滚转角测量干涉仪

Enhanced Roll-Angle Measurement Interferomerter

所有的机械导轨运动副都具有三个回转自由度或称作为角运动误差,包括俯仰角、偏摆角和滚转角误差,其中滚转角由于其产生的特别原因,而最难测量。针对现有的以对称的双楔角棱镜和对称的双楔面反射镜组成的滚转角测量干涉仪,提出了利用单楔角和单楔面反射镜的高精密滚转角测量干涉仪系统。由于系统所需光学元件较少,在实现相同测量分辨率的情况下,更有利于光学元件的加工和安装调试。系统中不同频率的两束光的传播路径相互平行,因此能够有效地减小死程误差和排除其他自由度的干扰,系统稳定性更好。使用普通的2π/512细分相位计,滚转角测量分辨率为2μrad。

All guide kinematic pair of machine tools have three rotating degrees of freedom which include pitching angle, yaw angle and roll angle, in which the roll angle is mostly difficulty to measure for the producing reasons.The existing roll angle measurement interferometer is comprised of two symmetrical wedge prisms and two symmetrical wedge mirrors. A enhanced roll angle measurement interferometer which only uses one wedge prism and one wedge mirror is proposed. The proposed system uses less optical component and has implemented the same measurement resolution, which is more stability. The two beams with different frequencies are paralleled which is efficient for reducing the dead path errors and eliminating the cross talk of other freedom errors. By using the phase meter of which the resolution is 2π/512, the roll angle resolution of this system is 2 μrad.