正交柱面镜像散位移测量方法的研究

Displacement Measuring Method Based on Astigmatism Effect of Crossed Cylindrical Lenses

为了实现物体位移测量的高精度,无损伤和简单化,对柱面镜像散效应进行了研究,利用正交柱面镜像散效应实现物体的位移测量。根据高斯光线追迹的矩阵方法,建立正交柱面镜的矩阵光线传播模型,并利用Zemax进行仿真验证;给出了正交柱面镜像散位移测量系统的矩阵传播模型,并具体分析了系统的量程和分辨率;进行实验验证,在5.6 mm量程范围内,实现了精度为200 nm的移位测量。该方法为位移测量提供了一种新的非接触、高精度的光学测量方式。

Higher precision, non-destructive and handy are necessary to the displacement measurement.Astigmatism effect in orthogonal cylindrical lenses is utilized to measure object displacement. In paraxial approximation, matrix methods for Gaussian ray model are used to trace analysis. In addition, Zemax is adopted to simulate the behavior of the model. Then, the displacement measuring system is set up.At the same time,measuring range and resolution of the system are discussed briefly. The result of the experiment indicates an applicable measuring range of 5.6μm with a highly accuracy of 200 nm for displacement measurement. The technique provides a new noncontract, highly accuracy method for displacement measurement.