西门子还原炉倒棒原因与预防

Prevention of polysilicon rod downfallen in Siemens reactor

改良西门子法是多晶硅的主流生产工艺,其核心反应器还原炉的大型化发展趋势明显,导致生产中倒棒的发生概率进一步加大,给提高生产效率和保障安全生产带来不利影响。通过对大量生产现象的观察结合理论分析,深入剖析了诱发倒棒的各项因素,并给出了针对性的预防措施。

Modified Siemens process is the main technology of polysilicon production,whose key reactor is the CVD reactor.In the recent years,large-scale reactor is popular,which is result in the increasing of downfallen of polysilicon filaments.The reasons of this problem were investigated through the observation in production process and theoretical analysis,and provided the solutions.