三腔并联气体压电泵设计

Design on Three-chamber Gas Piezoelectric Pump in Parallel

为提高压电泵输送气体能力,采用了一种开启压力较小、截止效果好的伞形橡胶阀,设计制造了三腔并联气体压电泵。试验测试了在3种工作方式下三腔并联压电泵的输出流量。结果显示：当3个振子同相工作时输出效果最好。将输出效果最好的试验数据同理论计算获得流量值比较,结果表明：在40~400 Hz工作频率内,二者结果非常接近,这证明了理论计算的正确性。所设计的三腔并联泵,在110 V正弦交流电驱动下,在测试工作频率段内,最大输出流量可达4 000m L/min。试验结果为了解三腔并联泵的工作特性提供了可信数据。

In order to improve output gas capability of piezoelectric pump, a three-chamber gas piezoelectric pump in parallel with passive check valve was designed and manufactured. An umbrella-shaped rubber valve with small opening pressure and better check effect was used in piezoelectric pump. The output gas flow-rate was experimentally measured. Test results show that the best output effect is when three vibrators are driven synchronously. Comparing testing data with the theoretical calculation value of output flowrate, the results show the two data are very close within operating frequency range of 40 - 400 Hz. The maximum output gas flow-rate is 4 000 mL/min when powered by 110 V drive voltage. The test results provide reliable data to understand the characteristics of threechamber gas piezoelectric pump in parallel.