摘要
介绍了ITO靶材的各种性能及应用,综述了目前常用的几种靶材成形方法和烧结工艺以及他们的研究现状,并对ITO靶材今后的发展趋势进行了展望。
The properties and applications of ITO target were described. The common forming methods, sintering process and its research status were summarized. Meanwhile, the future development trend of ITO target was prospected.
出处
《热加工工艺》
CSCD
北大核心
2015年第12期35-39,共5页
Hot Working Technology
基金
新国家自然科学联合基金资助项目(u0837601)
新国家基金资助项目(50874054)
云南省创新团队(2009CI003)
云南省自然科学基金资助项目(2008CD087)
