压电倾斜镜的自校正PID高精度跟踪控制

High precision tracking control of piezoelectric fast steering mirror based on self-tuning PID algorithm

压电倾斜镜是一种集光、机、电、控于一体的复杂强耦合非线性元器件。然而,由于压电材料迟滞非线性的存在,很难实现对倾斜镜倾斜角的高精度跟踪控制。为了对其进行有效控制,建立了倾斜镜带有扰动的单输入单输出模型,并采用自校正PID控制算法构成闭环控制实现动态跟踪定位。相应的开闭环实验结果表明:系统闭环后的输入输出跟踪曲线最大误差达0.66%,平均误差达0.10%,比开环性能有大幅度提高。也证实了极点配置自校正PID算法对倾斜镜跟踪控制系统的有效性。

Piezoelectric fast steering mirror（ PFSM） is a complex strong coupling nonlinear system that integrates optics,mechanics,electrics,control. It is difficult to control PFSM effectively due to the existence of hysteresis nonlinearity,thus the precise tracking control of the PFSM is a challenging task. The SISO ideal model of PFSM is established,and the hysteresis non-linearity is treated as a kind of disturbance,then the self-tuning PID algorithm is used to control the PFSM. The parameters of PID can adaptively be tuned to achieve high performance. From the dynamical positioning experiments,The self-tuning PID algorithm can perfectly control the PFSM,and maximum error reaches 0. 66%,mean error is 0. 10%. The experimental results verified the effectiveness of the proposed control strategy.