Cr-Ti-N系多层膜成分及周期对抗冲蚀性能的影响

Influence of Cr-Ti-N Multilayers with Different Periods and Constituents on Erosion Resistance Performance

苛刻环境下发动机组件存在严重的固体颗粒(SPE)冲蚀,导致其可靠性降低。为研究多层膜成分及调制周期对膜层冲蚀性能的影响,利用金属蒸发真空弧离子源(MEVVA)和磁过滤阴极真空弧复合离子束沉积技术在AM355基材表面制备交替周期分别为5、13和26的3组CrNx/TimCr1-mN、TiNy/TimCr1-mN多层膜。采用微粒喷浆冲蚀试验机、场发射扫描电子显微镜(FESEM)、X射线衍射仪(XRD)等对膜层冲蚀性能、形貌及物相结构进行测试表征。结果表明:采用该技术制备的CrNx/TimCr1-mN、TiNy/TimCr1-mN多层膜结构致密、交替层变化明显。随着交替周期的增加,两体系多层膜的晶面间距减小,抗冲蚀性能得到提高,分别提高了8倍和20倍以上。

Under harsh environments, the components in aircraft operating often endure decreasing reliability caused by solid particle erosion （SPE） degradation. In order to study the influences of different periodic multilayers on erosion per- formance, the 5, 13 and 26 periodic multilayers of CrNx/TimCr1-mN、TiNy/TimCr1-mN were prepared on AM355 sub-strates. Erosion resistance, surface characteristics and phase structure of different periodic multilayers were studied by employing solid particle impact machine （slurry jet）, field emission scanning electron microscope （FESEM） and X-ray diffraction. The results show that the films are compacted with distinctly alternated layers. With the increase of the peri- od, the crystal plane spacing becomes smaller, and the films exhibit great erosion resistance with 8 and 20 times improve-ment, respectively.