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The geometric resistivity correction factor for several geometrical samples 被引量:1

The geometric resistivity correction factor for several geometrical samples
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摘要 This paper reviews the geometric resistivity correction factor of the 4-point probe DC electrical conduc- tivity measurement method using several geometrical samples. During the review of the literature, only the articles that include the effect of geometry on resistivity calculation were considered. Combinations of equations used for various geometries were also given. Mathematical equations were given in the text without details. Expressions for the most commonly used geometries were presented in a table for easy reference. This paper reviews the geometric resistivity correction factor of the 4-point probe DC electrical conduc- tivity measurement method using several geometrical samples. During the review of the literature, only the articles that include the effect of geometry on resistivity calculation were considered. Combinations of equations used for various geometries were also given. Mathematical equations were given in the text without details. Expressions for the most commonly used geometries were presented in a table for easy reference.
作者 Serdar Yilmaz
出处 《Journal of Semiconductors》 EI CAS CSCD 2015年第8期1-8,共8页 半导体学报(英文版)
关键词 semiconductor four point probe conductivity measurement resistivity correction factor semiconductor four point probe conductivity measurement resistivity correction factor
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