基于灰度匹配理论的跨尺度微结构表面检测方法研究

An investigation on the metrology measurement method for micro- structured surfaces at a large scale based on gray matching theory

结合微结构功能表面的特点和检测要求,提出了一种以归一化灰度匹配理论为基础的跨尺度检测方法,并通过实际对比试验验证了其高效、可靠的检测效果,同时分析了光照强度对检测结果的影响,结果显示40%光照强度下检测效果最佳。最后通过在线检测实验验证了实现跨尺度微结构表面加工-检测一体化方法的可行性,对最终实现其设计-加工-检测一体化闭环系统具有重要作用。

According to the characteristics and manufacturing requirements of the large surfaces with microstruc- tures, a metrology measurement method is presented based on normalized gray -level matching theory, which is proved to be more efficient and industrial feasible as evidenced by comparative measurement tri- als. The effect of light intensity on measurement results is analyzed, which shows that 40% light intensi- ty can render the best measuring performance. Furthermore, the feasibility of a machining - measure- ment integrated approach on micro - structured surfaces at the large scale is validated by in - process measurement trials, which will play an important role in achieving the design - manufacturing - meas- urement system for industrial scale manufacturing of micro - featured surfaces.