ArF准分子激光器废气分析及处理技术

The Exhaust Gas Analysis and Treatment Technology of ArF Excimer Lasers

随着稀有气体卤化物准分子激光器的推广应用,直接排入大气中的废气给人体和环境带来了严重危害。为了降低其危害程度,分析了Ar F准分子激光器工作气体反应动力学和废气成分,得知其危害主要来源于废气中的含卤气体。卤化物准分子激光器废气处理装置具有两级吸收净化含卤气体的功能,采用总体积约50 L的Na OH(1.0 mol/L)和Ca(OH)2(0.02 mol/L)碱液对废气中含卤成分进行第一次吸收,采用总质量约1.0 kg的Ca(OH)2和Ca O固态碱性粉末(质量比为74∶112)固态碱性混合物对废气进行进一步净化。使用该装置对医用型Ar F准分子激光器的废气进行净化处理实验研究,实验结果表明,该废气处理装置可以吸附废气中95.6%的氟气,而且当碱液吸附效果不明显时,只需增加质量约74 g的Ca(OH)2可恢复其活性。

With the extension and application of rare-gas halide excimer laser, the exhaust gas discharge is also increasing, which brings serious harm to humans and the environment. In order to reduce the harm degree, the working gas reaction kinetics of ArF excimer lasers and the exhaust gas composition is analysed, and it is proved that the harm mainly comes from the halogen gas. The halide excimer laser exhaust gas treatment device with a two-stage absorption function is designed. The first absorption is using NaOH（1.0 moFL） and Ca（OH）2（0.02 tool/L） alkali liquid with the total volume about 50 litre to absorb the halogen gas in the exhaust gas, while the second absorption is using 1.0 kilogram solid Ca（OH）2 and CaO with the quality ratio is about 74/112 to purify the exhaust gas further. The device is used to purify the exhaust gas produced by the medical ArF excimer lasers, and the experimental results show that the device can absorbs 95.6% of fluorine in the exhaust gas. When the alkali absorption effect is not obvious, only adding about 74 grams Ca（OH）2 to the alkali can restore its activity.