沉积温度对疏松热解碳密度的影响

Effect of Coating Temperature on Density of Porous Pyrolytic Carbon

以乙炔为碳源气体,采用化学气相沉积的方法,在1100--1550℃范围内制备出疏松热解碳。利用图像法测定疏松热解碳的密度,用场发射扫描电镜检测了疏松热解碳的微观结构。结果表明：疏松热解碳密度在1100--1250℃范围内随沉积温度升高而升高,在1250-1350℃范围内密度随沉积温度升高而下降,到1350℃后密度趋于稳定;沉积温度为（1450±50）℃时,能制备出满足工艺要求的疏松热解碳。

The porous pyrolytic carbon was made by chemical vapor deposition in the temperature range from 1100~1550℃, using acetylene as the carbon source gas. Density of porous pyrolytic carbon was measured by image analysis technique. The microstructure of porous pyrolytic carbon was analyzed by SEM. The results show that： with the increasing of coating temperature at 1100~1250℃, the density of porous pyrolytic carbon increases; with the increasing of coating temperature at 1250-1350℃, the density of porous pyrolytic carbon reduces, and the density of porous pyrolytic carbon tends to be stable at〉 1350℃ range; when the coating temperature equals to （ 14504-50 ） ℃, the eligible porous pyrolytic carbon can be made.