反应等离子喷涂TiN涂层的研究进展

Research Progress of Reactive Plasma Sprayed TiN Coating

TiN具有硬度高、韧性好、摩擦系数小、化学性能稳定等优点,广泛应用于刀具、装饰、表面防护等领域。目前制备TiN涂层的方法有很多,如气相沉积、热喷涂、电镀等,反应等离子喷涂则是最常用的金属-陶瓷复合涂层制备方法。概述了反应等离子喷涂技术的基本原理和分类,包括反应等离子喷涂涂层的形成过程及工艺的优缺点。综述了反应等离子喷涂TiN涂层的喷涂工艺及性能的研究进展,包括涂层的制备方法（原位合成法、烧结破碎法）和性能特点,重点分析了涂层的力学性能、耐磨损性能、耐腐蚀性能,并提出了可以依靠热处理工艺或封孔技术来提高涂层的耐腐蚀性能。依据实验和查阅的文献,反应等离子喷涂结合了自蔓延高温合成技术和等离子喷涂技术,可以制备质量优良的厚TiN涂层（〉500μm）,是一种新型的低成本涂层制备技术,但是反应等离子喷涂制备TiN涂层存在孔隙率较高（5%-10%）、结合强度较低（〈50 MPa）的问题。分别从技术、设备、工艺、后处理四个方面总结了改善涂层质量的相应措施,展望了今后的研究发展方向。

TiN has excellent properties such as high hardness, good toughness, low friction coefficient, chemical stability, and has been used in cutting tools, decorations, surface protection. There are many methods to fabricate TiN coatings, such as vapor deposition, thermal spraying, electroplating, and reactive plasma spraying is a common way to prepare metal-ceramic composite coatings. The basic principles and types of reactive plasma spraying technology, including the process of coating, the advantages＆amp;nbsp;and the disadvantages, were reviewed, and the recent progresses of reactive plasma sprayed TiN coatings, including fabrication （ in-situ synthesis, sinter crushing） and properties were introduced. In addition, the mechanical properties, wear and corrosion re-sistance were analyzed. And the methods of heat treatment and sealing are suggested to improve the corrosion resistance of the coa-ting. According to the experiments and literatures, reactive plasma spraying is a novel technique with low production cost which combines the advantages of self-propagating high-temperature synthesis and plasma spraying. Thick TiN coatings （ over 500 μm） with high quality can be prepared via reactive plasma spraying. However, the reactive plasma sprayed TiN coatings also have prob-lems such as high porosity （5% to 10%） and low adhesion （〈50 MPa）. The measures to improve the quality of TiN coatings were summarized from the aspects of technology, facility, craft and post processing, and the trend of development was prospected.