飞秒激光烧蚀石英玻璃微槽截面形状仿真

Simulation of micro-groove cross-section in femtosecond laser ablation of quartz glass

基于透明电介质的烧蚀率计算模型,建立了飞秒激光烧蚀石英玻璃的微槽截面形状仿真模型,并通过烧蚀实验验证了模型的可靠性。利用所建模型分析了光斑半径、脉冲能量和扫描速度等参数对微槽截面形状的影响规律。研究表明,减小光斑半径、提高脉冲能量或降低扫描速度均可以提高微槽的槽深和侧壁角;微槽的槽宽随脉冲能量的提高或扫描速度的降低而增大,但随光斑半径的增大,其呈现先增大后减小的规律,在脉冲能量为4μJ、扫描速度为0.2 mm/s的条件下,槽宽在光斑半径为13μm时达到最大值8.13μm。

The cross-section shape simulation model of micro-groove in femtosecond laser ablation of quartz glass was built based on the ablation rate model of transparent dielectric. Besides, the model was verified by ablation experiment. The effect of pulse energy and scan speed on the cross-section shape of micro-groove was analyzed to achieve the adjustment method of micro-groove shape. The analysis of simulation results shows that the depth and sidewall angle of micro-groove can be improved by decreasing the spot radius, increasing the pulse energy or slowing the scan speed. The width of micro- groove be improved by increasing the pulse energy or slowing the scan speed, but with the increasing of spot radius, it first increases and then decreases. The width of micro-groove reaches a maximum of 8.13 μm at the spot radius of 13μm with the pulse of 4 μJ and the scan speed of 0.2 minis.