微膜尺寸与吸附物对微膜生化传感器动态特性的影响

Effect of micro-diaphragm size and adsorbate on dynamic properites of micro-diaphragm biochemical sensor

以微膜生化传感器为研究对象,利用ADINA软件进行模态分析,获得了微膜生化传感器在液态介质影响下的固有频率,分析了微膜结构尺寸和吸附物对传感器动态性能的影响。研究表明:微膜生化传感器的固有频率随着微膜厚度的增大而增大,随着微膜半径的增大而减小。吸附物质量使传感器的固有频率降低,吸附物的吸附位置也对传感器的固有频率产生影响。

Micro diaphragm biochemical sensor is taken as research target,modal analysis is carried out using ADINA software,natural frequencies of sensor in liquid medium is obtained,influence of size of micro diaphragm and adsorbate on dynamic property of sensor are analyzed. Research show that natural frequencies of the sensor increase with thickness of micro diaphragm increases and natural frequencies decrease with radius of micro diaphragm increases. And adsorbates lower the natural frequencies of the sensor,and position of adsorbate also influences natural frequencies of the sensor.