基于薄膜体声波谐振器的免疫球蛋白传感器制备

Fabrication of immune globulin sensor based on film bulk acoustic resonator

研制了一种基于薄膜体声波谐振器(FBAR)的生物免疫球蛋白传感器,该FBAR采用Al N作为压电层,3对Ti/W金属层作为布拉格声学反射层,工作频率为2.047 GHz,回波损耗为-32 d B。利用自组装膜法修饰顶部金电极敏感区域。测试了免疫球蛋白G抗体和抗原的特异性结合前后传感器的指标变化。结果得到传感器的Q值和灵敏度分别达到846,3.38 k Hz·cm2/ng,远高于广泛使用的石英晶体微天平(QCM),具有广阔的应用前景。

An immune globulin（ IG）sensor based on thin film bulk acoustic resonator（ FBAR）is presented, which works at 2. 047 GHz with -32 dB return loss,consisting of an AlN piezoelectric stack and three pairs of Ti/W Bragg reflector. Self-assembled monolayers（ SAMs ）are applied to modify the top Au electrode sensitive area. Index changes of sensor before and after combination of antigen and antibody of IG are test. The Q factor of sensor is calculated as high as 846 and the sensitivity as a biosensor can reach 3. 38 kHz＆#183;cm2/ng which much higher than that of QCM. Through the antibody detection experiment,the FBAR is proved to have the potential of exhibiting a more crucial effect in the biosensor field.