石英微机械陀螺敏感芯片的抗振动分析与改进

Analysis and Improvement of Anti-Vibration Characteristic for the Sensitive Chip of Quartz MEMS Gyroscope

石英微机械陀螺是振动惯性器件,而陀螺敏感芯片结构的抗振动能力会直接影响陀螺的性能。由于工作环境的振动会对陀螺的性能产生一定的影响,因此需提高陀螺敏感芯片结构的抗振动能力。该文利用有限元仿真软件对敏感芯片结构进行随机振动仿真分析,通过对敏感芯片结构的优化,提高了陀螺的抗振动能力。

Quartz MEMS gyroscope is vibrating inertial devices. And the anti-vibration ability of sensitive chip directly affects the performance of the gyro. Because the performance of gyroscope may be impacted by the vibration working environment, the ability of anti-vibration for sensitive chip of gyroscope has to be improved. The random vi- bration simulation analysis of the sensitive chip structure has been carried out by using the finite element simulation software. The anti-vibration ability of the sensitive chip has been improved through optimizing the sensitive chip structure.