摘要
采用固相法制备高热膨胀系数BaO-B2O3-SiO2微晶玻璃,并通过X线衍射分析(XRD)、扫描电子显微镜(SEM)等方法研究不同比例锆钛复合晶核剂对微晶玻璃中石英的晶型转变、显微结构、热膨胀性能和介电性能的影响。结果表明,适当增大BaO-B2O3-SiO2微玻璃中晶核剂TiO2/ZrO2的比例,能促进微晶玻璃中石英晶相向方石英晶相的转变,提高微晶玻璃的热膨胀系数;晶核剂含量(质量分数)为3%ZrO2+4%TiO2时,制备出微观结构均匀致密,密度为2.876g·cm-3,弯曲强度为172 MPa,热膨胀系数为16.05×10-6/℃,介电常数为5.81及介质损耗为6.4×10-4的低温共烧陶瓷(LTCC)基板封装材料。
BaO-B2O3-SiO2 glass-ceramics with high thermal expansion coefficient were prepared by the normal solid state reactions. Phase transformation of quartz, microstructure and thermal expansion coefficient of BaO-B2 O3- SiO2 glass-ceramics doped with different TiO2/ZrO2 were investigated by X-ray diffraction(XRD) and scanning elec- tron microscopes(SEM). Results showed that the thermal expansion coefficient of BaO-B2O3-SiO2 glass-ceramics could be promoted with the increasing of the proportion of the TiO2/Zr02 because of the phase transformation from quartz to cristobalite. When doped with 3% ZrO2 and 4% TiO2 as nucleating agents, the low temperature co-fired ceramics (LTCC) substrate material was obtained with compact structure(2. 876 g · cm^-3), max flexural strength of 172 MPa, thermal expansion coefficient of 16.05× 10^-6/℃, lower relative dielectric constant(5.81) and lower di- electric loss(6.4 × 10^-4 ).
出处
《压电与声光》
CSCD
北大核心
2015年第4期689-692,696,共5页
Piezoelectrics & Acoustooptics
基金
国防基础科研计划基金资助项目(A1420110097)