基于光栅干涉相位移动扫描的超精密测量方法

Ultra-precision Measuring Method Based on Grating Interferometer Stripe Phase Shift Principle

精密定位技术作为精密制造和精密装备的基础,一直制约着我国精密制造和精密装备产业的发展,而纳米级的位移测量技术又是制约精密定位技术发展的一个重要原因。研究了一种基于光栅干涉相位移动扫描原理的纳米级位移测量系统,利用光栅干涉仪实现光学四倍频,再利用条纹移相机构实现信号的进一步细分,获得亚纳米级的测量分辨率。

As the foundation of precision manufacturing and precision equipment, precise positioning technology has been restricting the development of our country＇s precision manufacturing and precision equipment industry. Yet precise positioning itself is restricted by nanoscale displacement measurement. This paper studies the nanoscale dis- placement measurement system based on stripe phase shift method. This system use grating interferometer to achieve optical quadruple, and then, use a stripe phase shift mechanism to further subdivided optical signal, providing a sub- nanometer resolution to the measurement system.